30+ days ago - req10216

Graduation assignment: Integrated optical sensor for wafer alignment, part 1

Research & Development


In a nutshell


Veldhoven, Netherlands


Research & Development


No experience (Student)



Job Category



This is a graduation assignment for a master's student in Applied Physics or Electrical Engineering with a strong interest in Photonics.

Job Mission

The continuous reduction of feature size in today’s integrated circuits pushes the limits of wafer positioning accuracy. To obtain high accuracy over the whole wafer, more alignment targets need to be measured in the same time, which creates the need for parallelization. However, employing multiple alignment sensors requires a reduction in sensor volume. In this project, we will explore the possibilities of integrated optics to construct a wafer positioning sensor that complies with the requirements of semiconductor metrology.

Job Description

This project is performed in collaboration with the Photonic Integration group (PhI) of the Technical University Eindhoven. Within this project, you will exploit the existing integrated optical components (such as surface gratings, power splitters, optical delay lines, etc) in an IMOS (InP Membrane on Silicon) platform and construct them into functional circuits for the alignment application. You will start with studying state-of-the-art integrated components and circuit architectures. In the subsequent design phase, the optimal components and architecture for the alignment application will be chosen. This design will then be fabricated and evaluated for performance in the PhI group. You will be supervised by dr. Erwin Bente and dr. Yuqing Jiao at the TU/e and by dr. Irwan Setija at ASML.


You are a master’s student in Applied Physics or Electrical Engineering with a strong interest in Photonics. You are familiar with the principles of photonics and optical waveguides and you are interested in applying these to the field of semiconductor metrology. Although there will be frequent interaction, we expect an independent working attitude and a strong drive to find solutions to problems never explored before.

This is a Graduation assignment for 2 days a week with a duration of 9 months.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?