30+ days ago - req9427

Vacuum Systems Architect

Research & Development


In a nutshell


Wilton - CT, US


Research & Development


8+ years



Job Category





ASML brings together the most creative minds in science and technology to develop lithography machines that are key to producing faster, cheaper, more energy-efficient microchips. We design, develop, integrate, market and service these advanced machines, which enable our customers - the world’s leading chipmakers - to reduce the size and increase the functionality of their microchips, which in turn leads to smaller, more powerful consumer electronics. Our main headquarters are located in Veldhoven, the Netherlands, and we also have 18 office locations around the United States- including main offices in Wilton, CT, Chandler, AZ, San Jose, CA and San Diego, CA.

Are responsibility and ownership your key strengths? Can you translate (high-level) performance requirements into a flow architecture and do you take the lead in getting technical issues solved? Do you see the big picture without missing the important details and are you capable of managing complex deliverables? Then we are looking for you! Join our enthusiastic and committed team to develop gas flow and vacuum solutions for our next generation of lithography scanners and bring ASML’s Vacuum Competence to the next level!

ASML is seeking an expert in Vacuum Systems Architecture in the Wilton, CT location in the Defectivity Group.Within ASML, the Development & Engineering (D&E) sector is responsible for the specification and design of ASML products. The Defectivity group is responsible for creating the perfect environment within the vacuum reticle modules in cutting edge EUV lithography machines. We take many approaches, such as designing the gas flow in vacuum, choosing the correct materials and designing cleanliness processes.

Job Mission

As Vacuum Systems Architect in the Defectivity group you will take the lead in specifying the vacuum systems and gas flows in the scanner and test rigs by supporting the hardware projects and the responsible hardware lead designers. Proper gas flow is critical to suppressing particle transport.You will ensure that hardware designs meet vacuum and gas common flow requirements during design phases of the product.You will be responsible for the translation of the overall system design into a gas flow & vacuum architecture that meets these requirements. You will ensure that the vacuum system components are specified and properly recorded in the Technical Product Documentation (TPD). You define and set up tests, and analyze measurement results to come up with new solutions that take us to the next level. You will specify qualification tests to ensure the architecture or subsystem is operating with all the specified functions and to specification.You will also support resolution of particle contamination issues through analysis and specification of flushing and venting procedures.You will collect and agree on all the specifications, create the budgets for flow & pressure, contamination, availability and cost of goods. Finally, with your expertise you contribute to the knowledge growth of our group, working together and coaching your team members. You report to the Group Leader of Defectivity and the Project Leader. Project team sizes vary from a few FTE to more than twenty FTE, a substantial part of which may be at co-developers. From time to time you may also be asked to go onsite at a customer.

ASML is a world leader in the manufacture of advanced technology systems for the semiconductor industry.ASML’s corporate headquarters is in Veldhoven, the Netherlands. Manufacturing sites and research and development facilities are located in Connecticut, California and the Netherlands. Technology development centers and training facilities are located in the United States, Japan, Korea, the Netherlands, and Taiwan. Additionally, ASML provides optimal service to its customers via over 50 sales and service organizations in 16 countries. Founded in the Netherlands in 1984, the company is publicly traded on Euronext Amsterdam and NASDAQ under the symbol ASML.

Job Description

-Define vacuum system and gas flow requirements for high-vacuum, large-chamber designs.
-Specify pump-down and vent procedures that ensure common flow.
-Participate in design FMEAs and design reviews for test rigs.
-Execute DOEs for degassing of chamber and components on product and process level.
-Provide general surface particulate and vacuum-grade cleanliness support.
-Troubleshoot and contribute in escalations.
-Transfer vacuum systems knowledge between ASML units.
-Frequently interact with D&E projects, Functions, Competences, Customer Support and Research.
-Perform analyses and calculations to predict the functionality of the flow architecture or subsystem (pressure drop budgeting, flow budgeting, humidification, gas purity).
-Contribute to the group competence growth by (literature) research, experimental work and/or cooperation with external research partners.
-Negotiate, define, document and present the specifications of flow architecture or subsystem to meet customer needs.
-Translate these specifications into conceptual designs. Provide guidance during the 3D design process.
-Take care of the functional integration of the architecture or subsystem: prove, document and present its proper functioning with offline and machine tests.
-Troubleshoot issues related to the architecture or subsystem, or the larger vacuum and gas flow domain inside the tools, including molecular and particle contamination.
-Derive conclusions from analysis and make practical recommendations.
-Present evidence-based results to audiences of a wide range of technical abilities.
-Demonstrate strong technical writing and communication skills, including the ability to contribute vacuum standards and procedures to Technical Product Documentation.
-Take direction from ASML System Architects and Senior Engineering mentors who are leading the development effort of critical large capital equipment.


BS (required) or MS (preferred) in Mechanical Engineering, Physics or related discipline, or equivalent experience.


-5+ years of experience in vacuum systems design, with solid theoretical and practical experience with vacuum and gas flow phenomena and applications, preferably in the semiconductor industry.
-Extensive experience with vacuum applications and vacuum equipment.
-Experience with measurement tools and setting up experiments.
-Experience with particle transport in flows, Rarefied gas flow and/or plasma physics is preferred.

Personal skills

-Customer oriented and able to work with high level problem solvers on a daily basis.
-High energy, self-motivated, quick study with flexible nature.
-Team player with strong ownership and ability to handle multiple projects and tasks concurrently with minimal guidance.
-Good knowledge of English.

Context of the position

The physical demands described here are representative of those that must be met by an employee to successfully perform the essential functions of this job. Reasonable accommodations may be made to enable individuals with disabilities to perform the essential functions.
-While performing the duties of this job, the employee routinely is required to sit; walk; talk; hear; use hands to keyboard, finger, handle, and feel; stoop, kneel, crouch, twist, reach, and stretch.
-The employee is occasionally required to move around the campus.
-The employee may occasionally lift and/or move up to 20 pounds.
-May require travel dependent on company needs.
-Specific vision abilities required by this job include close vision, color vision, peripheral vision, depth perception, and ability to adjust focus.
-Can work under deadlines.
-The environment generally is moderate in temperature and noise level.
-Must be able to read and interpret data, information, and documents.
-Can observe and respond to people and situations and interact with others encountered in the course of work.
-Can learn and apply new information or skills.

Other information

This position requires access to controlled technology, as defined in the Export Administration Regulations (15 C.F.R.730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access controlled technology.

EEO/AA (W/M/Vets/Disability) Employer.

Internal Reference: #LI-KG1