30+ days ago - req9698

Graduation assignment: redesign of the fine-focus projection grating module in the ASML level sensor

Research & Development

Design Engineering

Chemistry & Material science

Mechanical engineering


In a nutshell


Veldhoven, Netherlands


Research & Development, Design Engineering


No experience (Student)



Job Category

Chemistry & Material science, Mechanical engineering, Optics


Are you a Master student in Material Science, Tribology or a related discipline? then this graduation internship could be interesting for you.

Job Mission

Chips are produced in a series of etching and deposition steps. The pattern that is etched is typically created using an ASML machine. In order to create nanometer structures, the position and local height of the wafer has to be known accurately. Therefore, each wafer is first measured before it is exposed (patterned). ASML machines are able to process two wafers simultaneously, whereby one wafer is measured while the other wafer is exposed (patterned). During measurement, the local height map of the wafer is measured using a so called level sensor. The measured height map is used to assure correct focus at the expose side. For correct operation of the level sensor, several optical elements (lenses, mirrors) have to be aligned after assembly of the sensor into the scanner.

Job Description

You will be working with the Optical Mechanical Measurement Functions group to improve the adjustment accuracy of the projection grating, a critical part of the level sensor. The current adjustment accuracy and stability is limited by friction and wear in the contacts. In order to improve this, you will:

• Design and manufacture a setup to test the wear and friction behavior of different contact configurations, also in a vacuum
• Perform an experimental study on different coatings in order to minimize friction and wear in the current design.
• Redesign the module to improve friction and wear and validate your solution against critical specifications, e.g. lifetime.

Your main deliverable is a redesign of the projection grating adjustment module, whereby stick-slip and wear in the contact region are reduced by a factor of 2 or more.


You are a Master student in Material science, Tribology or a related discipline. You are creative, curious, goal oriented, capable of working independently and apply critical thinking to challenge and improve the status quo. You are fluent in English, both verbally and in writing.

This is a graduation internship with duration of 6+ months, for 5 days a week.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning ideas can be from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.