30+ days ago - req9756

Graduation assignment: Measure the secondary electron yield using scanning electron microscopy

Research & Development

Electrical engineering


In a nutshell


Veldhoven, Netherlands


Research & Development


No experience (Student)



Job Category

Electrical engineering, Physics


This is a graduation assignment for a master's student with a background in electronics and solid state physics.

Job Mission

Critical processes in the semiconductor industry can be impacted by residual electrical charge. The residual charge in a specific process impacts system performance negatively. Independent measurements have shown the charge is initially negative, residing near a material interface, and that it becomes positive in time. This is hypothesized to be caused by a larger than unity Secondary Electron Yield (SEY) at the material interface. Using Scanning Electron Microscopy andEnergy-dispersive X-ray spectroscopy (SEM/EDX) techniques, we want to quantify the SEY curve on test samples.

Job Description

Design a setup (using e.g. Faraday cups, time-resolved measurements, etc.) with which the SEY can be measured.
Your tasks will include:
- Introductory work at SEM setup
- Studying the literature to 1) find the test methods others have used for measuring SEY on insulating surfaces using SEM, and 2) to find the optimal SEM parameters for SEY research on glass.
- Build-up of setup feasibility with the aim of producing the SEY curve on one test sample.
- Measuring the influence of selected parameters and treatments on SEY.


You are a master’s student with a background in electronics and solid state physics. You know how to wire and set up electronic components and experiments, and you preferably have experience with SEM/EDX. You are a quick learner and you’re able to work independently.

This is graduation internship for 5 days a week with a minimum duration of 6 months and a maximum duration of 9 months.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?