30+ days ago - req9891

Internship: Impact of humidity sensor drift on lithography precision

Research & Development

Mechanical engineering


Chemistry & Material science

In a nutshell


Veldhoven, Netherlands


Research & Development


No experience (Student)



Job Category

Mechanical engineering, Physics, Chemistry & Material science


This is an apprentice internship for a master's student in Applied Physics, Mechanical Engineering, or Chemical Engineering, who is curious and driven and has good analytical skills.

Job Mission

The Machine Conditioning Department looks at the thermal and flow environment to achieve the nm level precision needed for lithography. The hardware from our department keeps sensor optical paths free from disturbance and temperature in critical areas stable within 10 mK.

Job Description

The silicon wafer is moved through the ASML lithography system using a position module (PM). The sensors that measure the location of the PM need a stable optical path to work, so air is provided around the optical path to keep it stable. A key factor for the stability of this optical path part is that the humidity of the air used is the same as that of the surrounding air. The humidity of air supplied is measured using sensors, but we are unsure if the sensors readout is sufficiently stable as the sensor ages over time.

Your investigation will include using field data to evaluate sensor stability. Also, you may need to discuss with the sensor manufacturer. The internship will focus on data analytics. In addition you will learn about ASML's lithography machines, how the sensor purging system functions, and the working of sensor(s) used.


You are a master’s student in Applied Physics, Mechanical Engineering, or Chemical Engineering. You’re curious and driven, and you have good analytical and interpersonal skills. Experience with Matlab is preferred.

This is an apprentice internship for 5 days a week with a duration of about 3 months.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?